Complementary metal–oxide–semiconductorpatible high efficiency subwavelength grating couplers for silicon integrated photonics Xiaochuan Xu,1,a),b) Harish Subbaraman,2,a) John Covey,1 David Kwong,1 Amir Hosseini,2 and Ray T. Chen1,b) 1Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin, Texas 78712, USA
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